Zygmunt Rymuza 來訪
奈米中心參訪留影
C.V. of Professor Zygmunt Rymuza
Zygmunt Rymuza received Ph.D. and Habilitation (D.Sc.) in design of fine mechanisms and tribology of miniature systems at the Warsaw University of Technology in Poland. He is professor of the Warsaw University of Technology (Department of Mechatronics) in the Institute of Micromechanics and Photonics and the leader of microtribology research group and director of two laboratories: “Laboratory of Micro/Nanotechnology” and “Laboratory of Microtribology”.
The research field now concerns mainly nanomechanics and micro/nanotribology of ultrathin films and MEMS/NEMS/nanotechnology materials and miniature tribosystems embodied in mechatronic devices.
He is author of the monographies „Tribology of Miniature Systems „(Elsevier Science Publishers, Amsterdam 1989) and „Tribology of Anti-Friction Polymers (published in Polish by WNT, Warsaw 1986), “Mechanical and Tribological Characterization of MEMS Structures” (with M.Pustan, Cluj-Napoca 2007) and over 300 technical papers published in many international and Polish journals and presented during most important conferences.
He organized and was the chairman of the series of unique, well-know in the world international conferences on „Micro-Tribology „ held in Laliki, Janowice and Jastarnia in Poland in 1993, 1997 and 2001 respectively and the last one Micro-Tribology 2005 in Karwica ,September 4-7, 2005. The conferences were attended by top micro/nanotribologists of the world and the selected papers presented during these meetings were published in the special volumes of international journal „Wear”. He is the member of board and vive-president of Polish Tribology Society .
His educational activities relate to the lectures and classes for graduated and undergraduated students in “Micromechatronics’, “Microtribology” , “Nanotechnology”, “Surface Engineering in Microtechnology”, “Design of Precise Instruments”.
The examples of recent publications :
於本實驗室做簡報
參觀成大博物館
Chapters in books:
1. Rymuza Z., Plastics, Chapter 5, in “Surface Modification and Mechanisms” ed. G.E.Totten, H.Liang, Marcel Dekker Inc., New York 2004, 81-97
2. Rymuza Z., Epilamization/Barrier Films, Chapter 14, in: Mechanical Tribology, ed. G.T.Totten, H.Liang, Marcel Dekker Inc, New York 2004, 475-489
Papers, presentations:
1. Rymuza Z., Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components, Journal of ASTM International, Vol.2, No.2 (February) 2005, 16 pages
2. Rymuza Z , Nanotribologia –spojrzenie w przyszłość, Zagadnienia Eksploatacji Maszyn, z.3 , Vol.39, 2004, 35-45
3. Rymuza Z., Misiak M., Rzanek-Boroch Z., Schmidt-Szałowski K., Janowska J., The effects of deposition and test conditions on nanomechanical behaviour of ultrathin films produced by plasma-enhanced chemical vapour deposition process at atmospheric pressure, Thin Solid Films, 466 , 2004, 158-166
4. Buzio R., Malyska K., Rymuza Z., Boragno C., Biscarini F., de Mongeot F.B., Valbusa U., Experimental investigation of the contact mechanics of rough fractal surfaces, IEEE Transactions on Nanobioscience, Vol. 3, March 2004, 27-31
5. Karapetyan A.N., Rymuza Z., Kusznierewicz Z., Tribologicheskije swojstwa polimer-polimernych par, Trenie i Iznos, Vol. 25, No.3, 2004, 292-305
6. Karapetyan A.N., Rymuza Z.., Kusznierewicz Z., Issledovanye vlijanya zazora na staticheskoye trenye v polimer-polimernych mikropodszipnikach, Trenie i Iznos, Vol. 25, No.2, 2004, 207-212
7. Kravchuk A.S., Kravchuk A.I., Rymuza Z.., Contact Displacement of Spatial Contact of a Rough Body and a Body with Coating, Technische Mechanik N.2, H.2, 2004, 116-124
8. Wyrobek J.T., Małyska K., Wrzesinska H., Rymuza Z., Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silikon, Zeitschrift fuer Metallkunde, Vol. 95, No. 5, 2004, 320-325
9. Wyrobek J.T., Wrzesinska H., Strom A., Rymuza Z.., Nowek A., Nanowear of Ultrathin TiN/NbN Superlattices Deposited on Silicon, Tribology Letters, Vol.18, No.2, February 2005, 165-172
10.Zhang J.Z., Zhou F., Wang J. Rymuza Z., Ma J., A comparative study of models of porous bearings, Jixie Sheji yu Yanjiu, Vol. 20, No.1, February 2004, 50-54, po chińsku
11. Wrzesińska H., Rymuza Z., Małyska K., Method of Investigation of Mechanical/wear Properties of Ultrathin Nitride Films Deposited on Silicon, Zagadnienia Eksploatacji Maszyn, 4 (140) 2004, 35-50
12. Kwacz M., .Chizhik S., Rymuza Z.,.Kusznierewicz Z., Badanie właściwości mechanicznych warstwy wierzchniej polimerowych elementów miniaturowego łożyska ślizgowego przy użyciu mikroskopu sił atomowych, Polimery , t.XLIX, 2004, nr 7-8, 551-557
13. Majewski T., Rymuza Z., Chizhik S., Pantelei S., Analysis of tapping mode of the tip in dynamic atomic force microscope, Elektronika, , nr 8-9, 2004, 228-231
14. .Balabanava N.V., S.A.Chizhik, Z.Rymuza, Effect of adhesion on contact of viscoelastic layer, Elektronika, , nr 8-9, 2004, 202-203
15.Ekwińska M., Landis S., Ekwiński G., Nowek A., Chaix N., Rymuza Z.: Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography, Zeitschrift fuer Metallkunde, v. 96, N.11 (November) 2005, s. 1287-1291 (24)
16. Falkowska D., Zielecka M., Balabanava N.V., Nowek A., Rymuza Z.: Adhesive and nanomechanical properties of polymeric films deposited on silicon, Zeitschrift fuer Metallkunde, v. 96, No.11 (November) 2005, s. 1292-1295 (24)
17.Zimmerman J., Majewski T., Rymuza Z.: Modelling of the nanoindentation process of ultrathin films, Zeitschrift fuer Metallkunde, v. 96, No.11 (November) 2005, s. 1296-1300 (15)
18.Denkiewicz D., Landis S., Ratajczyk Ł., Rymuza Z., Nanoindentation studies of stamp materials for nanoimprint lithography, International Journal of Materials Research, 2006, Vol. 97, No. 9, s.1239-1242 (20)
19. Balabanava N., Wierzbicki R., Heerlein H., Zielecka M., Rymuza Z., Low surface energy films for microgripping applications. Microelectronic Engineering. Vol. 83, Issue: 4-9, April - September, 2006, pp. 1389-1392.(20)
20.Zhang J.Z., Wang J.G., Ma J.J., Rymuza Z.., Kusznierewicz Z., Tribological characteristiics of porous Bering under micro-load: 1. Tribometer, Mocaxue Xuebao- Tribology, Vol. 26, No. 3, 2006, pp. 252-256, in Chinese
21.Zhang J.Z., Wang J.G., Ma J.J., Rymuza Z.., Kusznierewicz Z., Tribological characteristiics of porous Bering under micro-load: 1I. Experimental study of friction, Mocaxue Xuebao- Tribology, Vol. 26, No. 5, 2006, pp. 472-477, in Chinese
22.Ulejczyk B., Karpinski L., Scholz M., Ekwinska M.A., Rymuza Z.., Opalinska T., Żukowska A., Schmidt-Szałowski K., Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge, Czechoslovak Journal of Physics, Vol. 56, Suppl.B., 2006, pp. B1383-1390.
23Balabanava N.,.Rymuza Z., S.A.Chizhik S.A., Adhesion and friction behavior in the contact of rough viscoelastic surfaces. Journal ZEM (TEROTECHNOLOGY PROBLEMS OF MACHINES) Z.2(146), Vol. 41, 2006, pp.7-18.
24.Balabanava N., Rymuza Z., Chizhik S.A., Estimation of Young's Modulus and Adhesive Force of Polymeric Films by Use of Atomic Force Microscope, Metrology and Measurement Systems . Vol. XIII, Number 3 (2006), pp.253- 262.
25Balabanava N., Chizhik S.A., Rymuza Z.,. Topography analysis during optimization of polymeric coatings used for working surfaces of microgrippers , Trenie i Iznos, vol.27 issue 5, 2006 pp 514-519, in Russian
26.Balabanava N., Chygurinau V.., Rymuza Z., Zielecka M., . Nano-scale studies of effect of vibration on adhesive properties of polymers. Journal "Czasopismo Techniczne",6-M 2006, pp 11-16.
27.Ekwinska M., Rymuza Z., Estimation of energy needed to wear of silicon and quartz on micro/nanoscale, Tribologia, Vol. 73, No. 5, 2006, pp.17-27
28.. Rymuza Z., Ekwinska M., Landis S., Graillot R., Chaix N., Moscicki I., Koszewski A., Nowek A., Nanotribology of ultrathin polymeric resist films for nanoimprint lithography, Proceedings of ASIATRIB 2006, Kanazawa, Japan, October 16-19, 2006, Vol. 2, 501-502
29.Ekwinska M., Rymuza Z., Comparison of results of nanowear and nanoindentaion tests, Proceeedings of the AUSTRIB 2006, Brisbane, December3-6, 2006, Published on CD, pp. 6.
30.Balabanava N., Rymuza Z., Wierzbicki R., : Effect of sonolubrication on adhesive properties of polymeric coatings for MEMS microgrippers, in: MEMS Technology and Devices, Liu A. Wu J., Lu Ch. and Reddy Ch.D. (eds) Pan Stanford Publishing, Singapore 2007, s. 29-32
32. Ekwinska M., Ekwinski G., Rymuza Z..:Calibration of normal force in atomic force microscope, in: Recent Advances in Mechatronics, Jablonski R., Turkowski M., Szewczyk R. (eds), Springer Verlag, Berlin 2007, s. 505-510
33. Pustan M., Rymuza Z..; Comparative studies of advantages of integrated monolithic versus hybrid Microsystems, in: Recent Advances in Mechatronics, Jablonski R., Turkowski M., Szewczyk R. (eds), Springer Verlag, Berlin 2007, s. 521-525
34. Ekwinska M., Wielgo K., Rymuza Z.; Comparison of mechanical properties of thin film of SiNx deposited on silicon, in: : Recent Advances in Mechatronics, Jablonski R., Turkowski M., Szewczyk R. (eds), Springer Verlag, Berlin 2007, s. 521-525
35. Chizhik S.A., Rymuza Z., Chikunov V.V., Kuznetsova T.A., Jarzabek D.,: Micro- and nanoscale testing of tribomechanical properties of surfaces, in: : Recent Advances in Mechatronics, Jablonski R., Turkowski M., Szewczyk R. (eds), Springer Verlag, Berlin 2007, s. 541-545
36.Denkiewicz D., Rymuza Z.; Novel design of silicon microstructure for evaluating mechanical properties of thin films under quasi axial tensile conditions, in: : Recent Advances in Mechatronics, Jablonski R., Turkowski M., Szewczyk R. (eds), Springer Verlag, Berlin 2007, s. 546-550
37. Balabanava N., Wierzbicki R., Zielecka M., Rymuza Z.; Effect of roughness on adhesion of polymeric coatings used for microgrippers; Microelectronic Engineering, Vol. 84, Issues: 5-8, May - August, 2007, s. 1227-1230; 24; 4; 2; 12
38. Pustan M., Rymuza Z , Mechanical properties of flexible microcomponents with movable load, Journal of Micromechanics and Microengineering Vol. 17, No. 8 (August) , 2007, s.1611-1617; 24, 2, 2, 24
39. Kravchuk A., Rymuza Z ,Model of superlattice indentation; Kravchuk A., Rymuza Z., International Journal of Materials Research Vol. 98, No. 5 (May), 2007, s.379-383; 20; 2; 1; 10
40. Koszewski A ,Gorski T., Reuther F., Rymuza Z.; International Journal of Materials Research (d. Zeitschfrit für Metallkunde); Nanomechanical studies of ultrathin polymeric resist films, International Journal of Materials Research Vol. 98, No.5 (May), 2007, s. 393-396 ; 20, 4 , 3, 15
41.Pustan M., Ekwinski G., Rymuza Z.; Nanomechanical studies of MEMS structures, International Journal of Materials Research, Vol. 98, No.5 (May) , 2007, s. 384-388; 20, 3, 3, 20
42. Rymuza Z., Tribology of polymers, Archives of Civil and Mechanical Engineering, Vol. VII, No. 4, 2007, s. 175-184
43.Kravchuk A., Rymuza Z.,. Arbitrary penetration of a rigid axially symmetric indenter into an axially heterogeneous rigid-perfectly-plastic half-spaceopography analysis during optimization of polymeric coatings used for working surfaces of microgrippers , Technische Mechanik , Band 27, Heft 1, 2007, s. 67-76
44.Pustan M., Rymuza Z., Machine elements on micro-scale, Acta Technica Napocensis, Vol.2, , 2007, s.219-224.
45.Pustan M., Rymuza Z., Experimental tests of flexible microcomponents by use of atomic force microscope, Acta Technica Napocensis, Vol.2, 2007, s.225-228.
46.Rymuza Z., Ekwinska M., Koszewski A., Gorski T., Nowek A., Methods and techniques to study materials for nanoimprint lithography, Vienano`07 -2nd Vienna International Conference „Micro- and Nano-Technology March 14-16, 2007, Vienna, Austria, W.J.Bartz and F.Franek (eds) , OTG and TAE Vienna 2007, s. 49-53 - Invited
47.Koszewski A., Gorski T., Rymuza Z. : Tribological and mechanical studiem of polymeric resist films on nano-scale, Vienano`07 -2nd Vienna International Conference „Micro- and Nano-Technology March 14-16, 2007, Vienna, Austria, W.J.Bartz and F.Franek (eds) , OTG and TAE Vienna 2007, s. 175-180
48.Ishihara J., Koszewski A., Kayama M., Kawata H., Rymuza Z., Hirai Y., Evaluation of deteriorated anti-stiction layer in NIL, in Proceedings of Microprocesses and Nanotechnology 2007 – 20th International Microprocesses and Nanotechnology Conference MNC 2007, November 5-8, 2007 ,Kyoto, Japan, Japan Society of Applied Physics, Tokyo 2007, s. 450-451.
49.Rymuza Z.,Koszewski A., Ekwinska M., Nowek A., : Evaluation of ultrathin film of polymeric resists for nanoimprint lithography, in Proceedings of Microprocesses and Nanotechnology 2007 – 20th International Microprocesses and Nanotechnology Conference MNC 2007, November 5-8, 2007 ,Kyoto, Japan, Japan Society of Applied Physics, Tokyo 2007, s. 282-283
50.Pustan M., Rymuza Z., Schneider A., Serra S.G., Huq S.E.: Mechanical characteristics of multilayer MEMS components, in Proceedings of Microprocesses and Nanotechnology 2007 – 20th International Microprocesses and Nanotechnology Conference MNC 2007, November 5-8, 2007 ,Kyoto, Japan, Japan Society of Applied Physics, Tokyo 2007, s. 360-361
51.Ekwinski G., Trieu K., Rymuza Z., Evaluation of quality of mechanical components of MEMS pressure sensors, in Proceedings of Microprocesses and Nanotechnology 2007 – 20th International Microprocesses and Nanotechnology Conference MNC 2007, November 5-8, 2007 ,Kyoto, Japan, Japan Society of Applied Physics, Tokyo 2007, s. 374-375
52.A.Koszewski, F.Reuther, Z.Rymuza, Temperature dependent nanotribological behavior of ultrathin thermoplastic polymeric resist films studied by use of AFM, Proceedings of the STLE/ASME International Joint Tribology Conference IJTC2007October 22-24, 2007, San Diego, California, USA,IJTC2007- 44138 , 3 pages, CD, ISBN 0-7918-3811-0
53.Pustan M., Rymuza Z., Analysis of Mechanical Characteristics of Microsuspensions, Proceedings of the 7th Euspen International Conference, May 20-24, 2007, Bremen, Germany, Conference Volume _-Conference Volume II, ISBN10:0-9553082-2-4;ISBN 13:978-0-9553082-2-2, EUSPEN, Bedford UK 2007, pp. 225-228
54.Hirai Y., Ishihara J., Kayama M., Koszewski A., Rymuza Z., Quantitative study on deteriorated anti-stiction laser in NIL, NNT`07 – 6th Nanoprint and Nanoimprint Technology, October 10-12, 2007, Paris, France, 2007, Extended Abstract 1p.
55. Rymuza Z. "Studies of Surface Properties of Unmodified and Plasma Treated Ultrathin Resist Films for Nanoimprint Lithography “ , invited paper , iAY- 2007 and COEY-2007 -The 21 st Century COE Program International Symposium for Young Researchers - 2007 , February 7-9, 2007, Shizuoka University, Hamamatsu, Japan – Invited Plenary Talk
56.Rymuza Z., Characterisation of mechanical, tribological/adhesive properties of materials, ultrathin films and components applied in micro/nanotechnology , Open Academic Seminar of ASSEMIC European Project, April 19, 2007, FSRM , Neuchatel, Switzerland - Invited lecture
57.Rymuza Z.: Micro-Nanotribology, Proviking doctoral course on Tribology, 7-8th May,2007, Luleå University, Sweden , Invited Lectures